光學通訊和光纖感測器發展的龍頭選擇 Veeco 的離子束濺鍍技術
2019 年 02 月 05 日
Fraunhofer Institute for Telecommunications to Receive Veeco’s SPECTOR® Ion Beam Sputtering System with Enhanced Sirius™ Optical Monitoring System
Plainview, N.Y. – Veeco Instruments Inc. (Nasdaq: VECO) announced today that it has shipped its SPECTOR® Ion Beam Sputtering (IBS) system and the Sirius™ Optical Monitor System (OMS) to Fraunhofer Institute for Telecommunications. Fraunhofer, based in Berlin, will use Veeco’s IBS technology to develop and produce laser facet coatings and other micro-optical devices.
“The development of sophisticated micro-optical devices requires exceptional sputtering technology,” said Ms. Greta Ropers, head of backend and packaging group for Fraunhofer. “Veeco’s SPECTOR system, coupled with the Sirius OMS, ensures we are developing and producing world-class devices with the highest throughput and process repeatability on an automated, proven platform.”
According to customers, the SPECTOR platform generates the highest quality optical thin films with improved levels of productivity and throughput. Unlike evaporative coatings, ion beam sputtered thin films are deposited at high energies, giving exceptional thickness control and low defect densities for laser coating applications. Veeco’s Sirius OMS significantly enhances the SPECTOR platform capability by coupling cutting edge broadband monitoring control with the inherent stability of ion beam deposited films.
“Fraunhofer Institute for Telecommunications is a recognized worldwide leader in developing next generation laser facet coatings and micro-optical devices,” said Adrian Devasahayam, Ph.D., vice president and general manager of Veeco’s Advanced Deposition and Etch (AD&E) business. “The SPECTOR system sets the standard for precision optical coating thin films by providing unparalleled quality and flexibility that will no doubt accelerate their development goals.”
Funding for this project was granted by Forschungsfabrik Mikroelektronik, a cross-location research factory for microelectronics and nanoelectronics compromised of eleven institutes within the Fraunhofer Group along with the IHP GmbH - Innovations for High Performance Microelectronics and the Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik. For more information, please visit https://www.forschungsfabrik-mikroelektronik.de/en.html. The system was sold in cooperation with Veeco’s European channel partner, veonis Technologies GmbH.
Veeco is exhibiting at Photonics West (Feb. 5-7, San Francisco) and encourages attendees to visit Booth #3202 to learn more. Technical experts will discuss latest innovations in optical coating technology for industrial, defense, medical and telecom applications and MOCVD solutions for 3D sensing, LiDAR and datacom applications.
About Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute (HHI)
Fraunhofer HHI is a world leader in the development of mobile and optical communication networks and systems, fiber optical sensor systems as well as the processing and coding of video signals. Together with international partners from research and industry, Fraunhofer HHI works in the whole spectrum of digital infrastructure – from fundamental research to the development of prototypes and solutions. The institute develops standards for information and communication technologies and creates new applications as an industry partner.
Veeco (NASDAQ: VECO) is a leading manufacturer of innovative semiconductor process equipment. Our proven MOCVD, lithography, laser annealing, ion beam and single wafer etch and clean technologies play an integral role in producing LEDs for solid-state lighting and displays, and in the fabrication of advanced semiconductor devices. 採用設計為可實現最高效能、產量和擁有成本的設備，Veeco 在所有這些供應市場中佔有技術領先地位。To learn more about Veeco's innovative equipment and services, visit www.veeco.com
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